Radio Frequency Multi-arc Ion Plating Machine pvd vacuum coating equipment with PLC control system

Core components:

RF power supply system, arc target assembly, vacuum system, workpiece bias power supply and control system. The technical complexity is higher than that of DC type.

Working principle:

In a vacuum chamber, the high-frequency electric field excited by the radio frequency power supply ionizes the working gas (such as nitrogen or argon) to form high-density plasma. At the same time, the electric arc acts on the target material, causing it to evaporate. The atoms of the target material are further ionized and activated in the plasma environment, and eventually deposit on the surface of the workpiece under the action of negative bias voltage to form a high-performance film.

• Plasma performance is superior: Radio frequency discharge significantly enhances the density and activity of plasma, with an ionization rate of up to 80% to 95%.
• The quality of the film layer is more refined: The plasma uniformity is strong, the evaporation of the target material is more stable, the droplet defects are significantly reduced, and the smoothness and density of the film layer surface are significantly improved.
• Controllable coating temperature: The low-temperature characteristic of radio frequency discharge enables the deposition temperature of the workpiece to be 50 to 100 degrees Celsius lower than that of DC type, making it suitable for more heat-sensitive substrates.
• The target material compatibility range is wide: It is compatible with various target materials such as pure metals, alloys, and ceramics, and can be used to prepare single or composite film layers, with strong process flexibility.

• The film layer has outstanding comprehensive performance: it has a higher hardness (HV2000~3500), stronger wear resistance and corrosion resistance, and a lower surface roughness, balancing functionality and decoration.
• The deposition efficiency is balanced with high quality: The deposition rate is maintained at 8 to 80μm/h, which is slightly lower than that of the DC type but far exceeds that of magnetron sputtering, achieving a balance of "high efficiency + high quality".
• Wider substrate adaptability: The low-temperature deposition feature can handle some high-temperature sensitive workpieces, such as precision electronic components and thin-walled metal parts, expanding application scenarios.
• Good uniformity of the film layer: The plasma has a wide coverage range and can precisely adapt to complex curved surfaces and small parts, ensuring the consistency of the overall coating.
• Strong process stability: The output of the RF power supply is stable, reducing the film layer defects caused by unstable arc, and the qualification rate of mass-produced products is higher.

• Precision tools and molds industry: High-precision milling cutters, micro drills, optical molds, injection molds, etc., coated with high-end hard coatings such as TiAlN and AlCrN to enhance processing accuracy and service life.
• High-end decoration and 3C industry: mobile phone frames, notebook shells, high-end jewelry, luxury brand hardware parts, etc. Prepare high-gloss, particle-free decorative film layers (such as rose gold, gun gray, black), with a texture comparable to high-end electroplating.
• In the electronics and semiconductor industry: Semiconductor chip lead frames, electronic connectors, precision sensors, etc., are coated with conductive, wear-resistant and corrosion-resistant functional film layers to ensure the stability of components.
• High-end components for aerospace and automobiles: aircraft engine blades, automotive turbochargers, high-end bearings, etc., are coated with high-performance coatings that are resistant to high temperatures and fatigue, suitable for extreme working conditions.
• In the medical device industry: surgical instruments, implantable medical devices (such as orthopedic screws), etc., are coated with biocompatible, wear-resistant and anti-corrosive films to enhance the safety and service life of the devices.